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Dataset: Using HAXPES to quantify depth profiles through coatings using glow discharge optical emission spectroscopy (pulsed RF GD-OES)

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posted on 28.06.2021, 15:12 by Ben Spencer, Solene Bechu, Pia Dally, Muriel Bouttemy, Patrick Chapon, Arnaud Etcheberry
Chemical characterization at buried interfaces is a real challenge, as the physico-chemical processes operating at the interface govern the properties of many systems and devices. We have developed a methodology based on the combined use of pulsed RF GD-OES (pulsed Radio Frequency Glow Discharge Optical Emission Spectrometry) and XPS (X-ray Photoelectron Spectroscopy) to facilitate the access to deeply buried locations (taking advantage of the high profiling rate of the GD-OES) and perform an accurate chemical diagnosis using XPS directly inside the GD crater. The reliability of the chemical information is, however, influenced by a perturbed layer present at the surface of the crater, hindering traditional XPS examination, due to a relatively short sampling depth. Sampling below the perturbed layer may, however, can be achieved using a higher energy excitation source with an increased sampling depth, and is enabled here by a new laboratory-based HAXPES (Hard X-ray PhotoElectron Spectroscopy) (Ga-Kα, 9.25 keV). Here we attach our dataset of these measurements (Format: Origin 8.5).

Funding

Sir Henry Royce Institute - recurrent grant

Engineering and Physical Sciences Research Council

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Sir Henry Royce Institute - Manchester and NNL Equipment

Engineering and Physical Sciences Research Council

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Sir Henry Royce Institute - Manchester Build

Engineering and Physical Sciences Research Council

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