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Dataset: Using HAXPES to quantify depth profiles through coatings using glow discharge optical emission spectroscopy (pulsed RF GD-OES)
dataset
posted on 2021-06-28, 15:12 authored by Ben SpencerBen Spencer, Solene Bechu, Pia Dally, Muriel Bouttemy, Patrick Chapon, Arnaud EtcheberryChemical characterization at
buried interfaces is a real challenge, as the physico-chemical processes
operating at the interface govern the properties of many systems and devices.
We have developed a methodology based on the combined use of pulsed RF GD-OES (pulsed
Radio Frequency Glow Discharge Optical Emission Spectrometry) and XPS (X-ray
Photoelectron Spectroscopy) to facilitate the access to deeply buried locations
(taking advantage of the high profiling rate of the GD-OES) and perform an
accurate chemical diagnosis using XPS directly inside the GD crater. The
reliability of the chemical information is, however, influenced by a perturbed
layer present at the surface of the crater, hindering traditional XPS
examination, due to a relatively short sampling depth. Sampling below the
perturbed layer may, however, can be achieved using a higher energy excitation
source with an increased sampling depth, and is enabled here by a new
laboratory-based HAXPES (Hard X-ray PhotoElectron Spectroscopy) (Ga-Kα, 9.25
keV). Here we attach our dataset of these measurements (Format: Origin 8.5).
Funding
Sir Henry Royce Institute - recurrent grant
Engineering and Physical Sciences Research Council
Find out more...Sir Henry Royce Institute - Manchester and NNL Equipment
Engineering and Physical Sciences Research Council
Find out more...Sir Henry Royce Institute - Manchester Build
Engineering and Physical Sciences Research Council
Find out more...